Published date: 23 December 2016

Closed opportunity - This means that the contract is currently closed. The buying department may be considering suppliers that have already applied, or no suitable offers were made.


Closing: 30 January 2017

Contract summary

Industry

  • Laboratory, optical and precision equipments (excl. glasses) - 38000000

Location of contract

BS8 1TL

Value of contract

£180,000

Procurement reference

tender_134494/557605

Published date

23 December 2016

Closing date

30 January 2017

Contract start date

20 February 2017

Contract end date

19 February 2022

Contract type

Supply contract

Procedure type

Open procedure

Any interested supplier may submit a tender in response to an opportunity notice.

Contract is suitable for SMEs?

Yes

Contract is suitable for VCSEs?

No


Description

We want to acquire a Plasma-Enhanced Chemical Vapour Deposition (PECVD) system. Your proposed System should be able to deposit thin films of silicon oxide, silicon nitride, combinations of both (silicon oxynitride) and also amorphous silicon. Your proposed System will be located in a class 10000 cleanroom space and will be operated by students and technical staff. Your proposed System should integrate smoothly with the existing facilities without any prejudice for the normal operation of the space.
We envisage two main purposes for your proposed System: the deposition of dielectric cladding and mask layers for the fabrication of silicon photonic circuits based on SOI technology and the deposition of amorphous silicon films to be used as the guiding layer for photonic circuits. Your proposed System should excel at uniformity in film thickness and film composition not only over the surface of the samples (typically SOI wafers or pieces between 1cm in area and 6 inches in diameter) but also between consecutive processes on different samples. The metrics used to evaluate the performance will be uniformity, reproducibility, consistent film composition, low stress and low defect density both on accuracy and degree of control.


About the buyer

Address

1-9 Old Park Hill
Bristol
BS2 8BB
England

Email

will.smalley@bristol.ac.uk