Published date: 6 March 2017

Closed opportunity - This means that the contract is currently closed. The buying department may be considering suppliers that have already applied, or no suitable offers were made.


Closing: 24 March 2017

Contract summary

Industry

  • Spectroscopy devices - 33114000

Location of contract

LS2 9JT

Value of contract

£0

Procurement reference

MW/E/2797

Published date

6 March 2017

Closing date

24 March 2017

Contract start date

31 July 2017

Contract end date

30 July 2022

Contract type

Supply contract

Contract is suitable for SMEs?

No

Contract is suitable for VCSEs?

No

Description

The University of Leeds is seeking tenders for an ex situ (standalone) spectroscopic ellipsometer. The system will be used for research and should offer flexibility of use, having the ability to measure the properties of thin-films (including isotropic and anisotropic single films and multiple layer stacks) deposited on Si, GaAs and quartz substrates amongst others. The system must be capable of measuring the thickness (and other optical properties) of:
o ALD-deposited oxides and nitrides of: Sn, Hf, Al, Ti amongst others (typical film thickness < 50 nm). In particular, measurement of 1.8 ? Al2O3 films grown on Si (plus its native oxide) is required.
o PECVD-deposited silicon oxide, nitride and oxinitride films (typical film thickness < 2 ?m).
o Electron-beam resists including PMMA, HSQ and ?-chloromethacrylate:?-methylstyrene copolymers (ZEP-520A) etc. films (typical film thickness < 1 ?m).
o Photoresists including novolac-based (e.g. S1813, AZ4562 etc.) and epoxy-based (e.g. SU-8) films (typical film thickness < 10 ?m).

In addition, measurement of the thickness (and other optical properties) of the following would be desirable:
o Self-assembled monolayers formed on Au surfaces (typical film thickness < 1nm).
o Thin (10's nm) metal films.
o Photoresists (as defined above) in the thickness range 10 - 150 ?m.

These properties may include, but are not limited to: optical properties, surface roughness, interface properties, material gradients, porous films, depolarization. Vendors may submit multiple tenders if suitable alternative equipment exists within their product range, or may detail alternative options within a single tender response.

More information

Links

Additional text

Is a Recurrent Procurement Type? : No

About the buyer

Contact name

Maggie Whitworth

Address

University of Leeds
Leeds
West Yorkshire
LS2 9JT
United Kingdom

Telephone

0113 3439054 / 4710

Email

facmag1@ds.leeds.ac.uk